The Alpha 21164, also known by its code name, EV5, is a microprocessor developed and fabricated by Digital Equipment Corporation that implemented the Alpha instruction set architecture (ISA). It was introduced in January 1995, succeeding the Alpha 21064A as Digital's flagship microprocessor. It was succeeded by the Alpha 21264 in 1998.

Alpha is a 64-bit reduced instruction set computer (RISC) instruction set architecture (ISA) developed by Digital Equipment Corporation (DEC). Alpha was designed to replace 32-bit VAX complex instruction set computers (CISC) and to be a highly competitive RISC processor for Unix workstations and similar markets.