Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.
An atomic force microscope on the left with controlling computer on the right
Fig. 3: Typical configuration of an AFM. (1): Cantilever, (2): Support for cantilever, (3): Piezoelectric element (to oscillate cantilever at its eigen frequency), (4): Tip (Fixed to open end of a cantilever, acts as the probe), (5): Detector of deflection and motion of the cantilever, (6): Sample to be measured by AFM, (7): xyz drive, (moves sample (6) and stage (8) in x, y, and z directions with respect to a tip apex (4)), and (8): Stage.
Fig. 5: Topographic image forming by AFM. (1): Tip apex, (2): Sample surface, (3): Z-orbit of Tip apex, (4): Cantilever.
Electron micrograph of a used AFM cantilever. Image width ~100 micrometers
Diffraction-limited system
In optics, any optical instrument or system – a microscope, telescope, or camera – has a principal limit to its resolution due to the physics of diffraction. An optical instrument is said to be diffraction-limited if it has reached this limit of resolution performance. Other factors may affect an optical system's performance, such as lens imperfections or aberrations, but these are caused by errors in the manufacture or calculation of a lens, whereas the diffraction limit is the maximum resolution possible for a theoretically perfect, or ideal, optical system.
Image: Ernst Abbe memorial