Diffusion pumps use a high speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the exhaust. They were the first type of high vacuum pumps operating in the regime of free molecular flow, where the movement of the gas molecules can be better understood as diffusion than by conventional fluid dynamics. Invented in 1915 by Wolfgang Gaede, he named it a diffusion pump since his design was based on the finding that gas cannot diffuse against the vapor stream, but will be carried with it to the exhaust. However, the principle of operation might be more precisely described as gas-jet pump, since diffusion also plays a role in other types of high vacuum pumps. In modern textbooks, the diffusion pump is categorized as a momentum transfer pump.

A vacuum pump is a type of pump device that draws gas particles from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke, and was preceded by the suction pump, which dates to antiquity.