Excimer laser
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An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated
An excimer laser
Final amplifier of the Nike laser where laser beam energy is increased from 150 J to ~5 kJ by passing through a krypton/fluorine/argon gas mixture excited by irradiation with two opposing 670,000 volt electron beams.
Photolithography
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Photolithography is a process that involves using light to transfer a pattern onto a photoresist layer deposited on a sample, typically a silicon wafer. It is used in the manufacturing of integrated c
Excimer laser
…based integrated circuits or "chips", eye surgery, and micromachining. Since the 1990s, excimer lasers have been widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. The term excimer is short for 'excited dimer', while…
Silicon wafer that has undergone photolithography
The wafer track portion of an aligner that uses 365 nm ultraviolet light.