MEMS is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size, and MEMS devices generally range in size from 20 micrometres to a millimetre, although components arranged in arrays can be more than 1000 mm2. They usually consist of a central unit that processes data and several components that interact with the surroundings.
Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"
A Texas Instruments DMD chip for cinema projection
Digital micromirror device
The digital micromirror device, or DMD, is the microoptoelectromechanical system (MOEMS) that is the core of the trademarked Digital Light Processing (DLP) projection technology from Texas Instruments (TI). Texas Instrument's DMD was created by solid-state physicist and TI Fellow Emeritus Dr. Larry Hornbeck in 1987. However, the technology goes back to 1973 with Harvey C. Nathanson's use of millions of microscopically small moving mirrors to create a video display of the type now found in digital projectors.
A DMD chip, used in most projectors and some TVs
A broken DMD chip showing the "white dots" appearing on screen as "white pixels".
