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Sputtering
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In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas
A commercial AJA Orion sputtering system at Cornell NanoScale Science and Technology Facility
A commercial AJA Orion sputtering system at Cornell NanoScale Science and Technology Facility
Ion thruster operating on iodine (yellow) using a xenon (blue) hollow cathode. High-energy ions emitted from plasma thrusters sputter material off the
Ion thruster operating on iodine (yellow) using a xenon (blue) hollow cathode. High-energy ions emitted from plasma thrusters sputter material off the surrounding test chamber, causing problems for ground testing of high-power thrusters.
A commercial sputtering system
A commercial sputtering system
Sputter deposition
Videos
Sputter deposition is a physical vapor deposition method of thin film deposition by the phenomenon of sputtering. This involves ejecting material from a "target" that is a source onto a "substrate" su
Sputtering
…composition being changed. Often the species with the least mass or the highest vapor pressure is the one preferentially sputtered from the surface. Sputter deposition is a method of depositing thin films by sputtering that involves eroding material from a "target" source onto a "substrate", e.g. a silicon wafer, solar…
Sputter-coated ant specimen (Aulacopone relicta) for SEM examination.
Sputter-coated ant specimen (Aulacopone relicta) for SEM examination.
A typical ring-geometry sputter target, here gold showing the cathode made of the material to be deposited, the anode counter-electrode and an outer r
A typical ring-geometry sputter target, here gold showing the cathode made of the material to be deposited, the anode counter-electrode and an outer ring meant to prevent sputtering of the hearth that holds the target.
Magnetron sputtering source
Magnetron sputtering source
A magnetron sputter gun showing the target-mounting surface, the vacuum feedthrough, the power connector and the water lines. This design uses a disc
A magnetron sputter gun showing the target-mounting surface, the vacuum feedthrough, the power connector and the water lines. This design uses a disc target as opposed to the ring geometry illustrated above.