Photolithography
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Photolithography is a process that involves using light to transfer a pattern onto a photoresist layer deposited on a sample, typically a silicon wafer. It is used in the manufacturing of integrated c
Silicon wafer that has undergone photolithography
The wafer track portion of an aligner that uses 365 nm ultraviolet light.
EUV lithography
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Extreme ultraviolet lithography is a technology used in the semiconductor industry for manufacturing integrated circuits. It is a type of photolithography that uses 13.5 nm extreme ultraviolet light f
Photolithography
…Photolithography processes can be classified according to the type of light used, including ultraviolet lithography, deep ultraviolet lithography, extreme ultraviolet lithography (EUVL), and X-ray lithography. The wavelength of light used determines the minimum feature size that can be formed in the photoresist. Ultraviolet (UV) light…
An EUVL tool, Lawrence Livermore National Laboratory
Pupil rotation across slit forces use of much lower pupil fill (within the trapezoids or rectangles) for dipole illumination.